MEMS Product Development
Alissa M. Fitzgerald, Carolyn D. White & Charles C. Chung
Levitation Micro-Systems
Kirill Poletkin
Process Variations in Microsystems Manufacturing
Michael Huff
Piezoelectric MEMS Resonators
Harmeet Bhugra & Gianluca Piazza
Advanced Mechatronics and MEMS Devices II
Dan Zhang & Bin Wei
Microtechnology for Cell Manipulation and Sorting
Wonhee Lee, Peter Tseng & Dino Di Carlo
Stretchable Bioelectronics for Medical Devices and Systems
John A. Rogers, Roozbeh Ghaffari & Dae-Hyeong Kim
Micro-Relay Technology for Energy-Efficient Integrated Circuits
Hei Kam & Fred Chen
Piezoresistor Design and Applications
Joseph C. Doll & Beth L. Pruitt