Multi-Wafer Rotating MEMS Machines Otros libros de esta serie

MEMS Reliability MEMS Reliability
2010
MEMS Materials and Processes Handbook MEMS Materials and Processes Handbook
2011
RF MEMS Switches and Integrated Switching Circuits RF MEMS Switches and Integrated Switching Circuits
2010
Radioisotope Thin-Film Powered Microsystems Radioisotope Thin-Film Powered Microsystems
2010
Silicon Carbide Microsystems for Harsh Environments Silicon Carbide Microsystems for Harsh Environments
2011
Microfluidic Technologies for Miniaturized Analysis Systems Microfluidic Technologies for Miniaturized Analysis Systems
2007
BioNanoFluidic MEMS BioNanoFluidic MEMS
2007
MEMS Vibratory Gyroscopes MEMS Vibratory Gyroscopes
2008
Photonic Microsystems Photonic Microsystems
2009