Multi-Wafer Rotating MEMS Machines Otros libros de esta serie
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MEMS Materials and Processes Handbook
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RF MEMS Switches and Integrated Switching Circuits
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Radioisotope Thin-Film Powered Microsystems
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Silicon Carbide Microsystems for Harsh Environments
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Microfluidic Technologies for Miniaturized Analysis Systems
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BioNanoFluidic MEMS
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MEMS Vibratory Gyroscopes
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