Silicon Carbide Microsystems for Harsh Environments Otros libros de esta serie
Microfluidic Technologies for Miniaturized Analysis Systems
2007
BioNanoFluidic MEMS
2007
MEMS Vibratory Gyroscopes
2008
Photonic Microsystems
2009
Multi-Wafer Rotating MEMS Machines
2009
MEMS Reliability
2010
MEMS Materials and Processes Handbook
2011
RF MEMS Switches and Integrated Switching Circuits
2010
Radioisotope Thin-Film Powered Microsystems
2010