BioNanoFluidic MEMS

BioNanoFluidic MEMS explains nanofabrication and nanomaterials synthesis suitable for the development of biosensors. The fundamentals initiate an awareness for engineers and scientists who would like to develop and implement novel biosensors for various applications. In addition, the material covered includes:


BioNanoFluidic MEMS connection between the interdisciplinary nature of
BioNanoFluidics and MEMS
 

BioNanoFluidics and sensor technology including Micro-Mechanical Sensors and Chemical Sensor Technologies



Hands-on steps for implementation of biosensor fabrication including a discussion of the clean room lithography process and etching, microsensor systems lamination, PDMS moulding, parylene deposition, and others



Interconnection between the interdisciplinary nature of BioNanoFluidics and MEMS



BioNanoFluidics and sensor technology including Micro-Mechanical Sensors and Chemical Sensor Technologies

Discussion of fabrication processes for implementation of biosensor and nanochemical sensors including the clean room lithography process, etching, chemical vapor deposition, electroplating, microsensor systems lamination, PDMS moulding, parylene deposition, and others



Selected coverage of Nano/Microfabrication, Nano Manufacturing and Nano/Micro Integration


"The MEMS Reference Shelf is a series devoted to Micro-Electro-Mechanical Systems (MEMS), which combine mechanical,electrical, optical, or fluidic elements on a common microfabricated
substrate to create sensors, actuators, and microsystems. This series,authored by leading MEMS practitioners, strives to provide a framework where basic principles, known methodologies, and new applications are integrated in a coherent and consistent manner."


STEPHEN D. SENTURIAMassachusetts Institute of Technology, Professor of Electrical Engineering, Emiritus