• 97,99 €

Descrizione dell’editore

This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users.

GENERE
Professionali e tecnici
PUBBLICATO
2019
27 luglio
LINGUA
EN
Inglese
PAGINE
306
EDITORE
Springer International Publishing
DIMENSIONE
44.7
MB

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