Sputtered Thin Films

Sputtered Thin Films: Theory and Fractal Descriptions provides an overview of sputtered thin films and demystifies the concept of fractal theory in analysis of sputtered thin films. It simplifies the use of fractal tools in studying the growth and properties of thin films during sputtering processes. Part 1 of the book describes the basics and theory of thin film sputtering and fractals. Part 2 consists of examples illustrating specific descriptions of thin films using fractal methods.

Discusses thin film growth, structure, and properties

Covers fractal theory

Presents methods of fractal measurements

Offers typical examples of fractal descriptions of thin films grown via magnetron sputtering processes

Describes application of fractal theory in prediction of thin film growth and properties


This reference book is aimed at engineers and scientists working across a variety of disciplines including materials science and metallurgy as well as mechanical, manufacturing, electrical, and biomedical engineering.