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Digital Holography for MEMS and Microsystem Metrology
Other Books in This Series
Microsystem Dynamics
2025
Mechanics of Microsystems
2017
Advanced Computational Nanomechanics
2015
Micro-Cutting
2013
Nanoimprint Technology
2013
Nano and Cell Mechanics
2012
Multiscale Analysis of Deformation and Failure of Materials
2011