Microfluidic Technologies for Miniaturized Analysis Systems
Steffen Hardt & Friedhelm Schönfeld
BioNanoFluidic MEMS
Peter J. Hesketh
MEMS Vibratory Gyroscopes
Cenk Acar & Andrei Shkel
Photonic Microsystems
Olav Solgaard
Multi-Wafer Rotating MEMS Machines
Jeffrey Lang
MEMS Reliability
Allyson L. Hartzell, Mark G. da Silva & Herbert R. Shea
Book 1
MEMS Materials and Processes Handbook
Reza Ghodssi & Pinyen Lin
Book 5
RF MEMS Switches and Integrated Switching Circuits
Ai-Qun Liu
Book 6
Radioisotope Thin-Film Powered Microsystems
Rajesh Duggirala, Amit Lal & Shankar Radhakrishnan
Book 22
Silicon Carbide Microsystems for Harsh Environments
Muthu Wijesundara & Robert Azevedo