Microchip Fabrication: A Practical Guide to Semiconductor Processing, Sixth Edition

The most complete, current guide to semiconductor processing

Fully revised to cover the latest advances in the field, Microchip Fabrication, Sixth Edition explains every stage of semiconductor processing, from raw material preparation to testing to packaging and shipping the finished device. This practical resource provides easy-to-understand information on the physics, chemistry, and electronic fundamentals underlying the sophisticated manufacturing materials and processes of modern semiconductors.

State-of-the-art processes and cutting-edge technologies used in the patterning, doping, and layering steps are discussed in this new edition. Filled with detailed illustrations and real-world examples, this is a comprehensive, up-to-date introduction to the technological backbone of the high-tech industry.

COVERAGE INCLUDES:

The semiconductor industry

Properties of semiconductor materials and chemicals

Crystal growth and silicon wafer preparation

Wafer fabrication and packaging

Contamination control

Productivity and process yields

Oxidation

The ten-step patterning process--surface preparation to exposure; developing to final inspection

Next generation lithography

Doping

Layer deposition

Metallization

Process and device evaluation

The business of wafer fabrication

Devices and integrated circuit formation

Integrated circuits

Packaging